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围绕精密仪器研究，本期精选5篇发表在《仪器仪表学报》上的文章，欢迎阅读！

精选文章·Selected Articles

01

一种高灵敏度磁性液体倾角传感器的研究

Study on a magnetic fluid inclination sensor with high sensitivity

【摘要】 磁性液体独特的二阶悬浮力可以替代固体弹性元件为倾角传感器的惯性元件提供一个柔性弹性力，能够极大提高倾角传感器的抗冲击性能，已经在石油勘探行业成功应用。为进一步提高磁性液体倾角传感器的灵敏度，基于磁性液体的二阶悬浮特性提出了一种新的结构和检测方法，对传感器中两个永磁体间磁场的空间分布进行了理论计算和仿真，并通过试验对比分析了在选定不同参数条件下传感器的静态性能，最终得到当侧向间隙为3 mm,磁性液体注入量为1.4 g时，传感器量程为0°~50°，线性度误差为1.0047%，灵敏度为2.3 mV/°，分辨率为0.023°，重复性误差为3.18%，工作性能最佳，且该传感器性价比高，壳体用材环保，具有很好的实用价值。

【Abstract】 Magnetic liquid can replace solid elastic element with its unique second-order suspension force to provide the inertial element of the inclination sensor with a flexible elastic force, which can greatly improve the impact resistance of the inclination sensor. It has been successfully applied in petroleum exploration industry. To improve the sensitivity of the magnetic liquid inclination sensor, a new structure and detection method is proposed based on the second-order suspension characteristics of magnetic liquid. The spatial distribution of magnetic field between two permanent magnets is calculated by the theory, and the static performance of the sensor with different parameters is analyzed by experiment comparisons. Results show that when the side clearance is 3 mm, and the amount of magnetic fluid is 1.4 g, the measurement range is from 0° to 50°; the linearity error is 1.004 7%; the response rate is 2.3 mV/°; the resolving power is 0.023°; the repeatability error is 3.18%; the working performance of the sensor is the best. In addition, the performance-price-ratio index of the sensor is high, and the material of the housing is environmentally friendly, which makes it have excellent practical value.

02

抗过载环形MEMS固体波动陀螺设计加工与测试

Design, processing and test of anti-high-overload ring-shaped MEMS solid fluctuation gyroscope

【摘要】 本文针对传统MEMS振动陀螺在经历高过载过程无法存活且冲击前后参数变化大的问题，开展了抗高过载MEMS固体波动环形微机械陀螺设计、加工和测试方面的研究工作。首先，提出了全对称梁的陀螺结构形式，该结构能够有效的减小冲击过程在结构中造成的应力残留，配合止挡机构以及灌封技术能够提升陀螺在冲击过程中的存活能力，并在此基础上推导了陀螺的动力学方程和敏感轴冲击振荡运动函数，指出了敏感轴冲击模态的固有频率越高、品质因数越小则越有利于提高陀螺在敏感轴上的抗冲击特性。其次，利用有限元分析软件对陀螺结构进行了模态分析和冲击特性仿真，结果显示陀螺的最大位移和应力分别为9.46μm和99.6 MPa,保证了陀螺结构具有较好的抗冲击裕度。再次，利用较为成熟的玻璃-硅键合和深硅刻蚀工艺实现了陀螺结构的加工，结合陶瓷封装实现了陀螺结构的真空封装，并基于驱动闭环和检测开环回路搭建了陀螺的测试系统。最后，在实验室环境下利用冲击台实现了对陀螺样机的冲击测试，冲击过程(脉宽0.6 ms)出现了多个5000 g以上的峰值，最大峰值为16050 g,陀螺响应时间约为1 s,冲击前后陀螺零位变化小于1%,验证了本文研制样机的抗过载能力。

【Abstract】 The traditional micro electro mechanical system (MEMS) vibrating gyroscope cannot survive in the process of high overload and the parameters change greatly before and after the impact. To address these issues, this article proposes the MEMS solid ring wave gyroscope, including its design, processing and testing. Firstly, a gyroscope structure with a fully symmetrical beam and potting technology is proposed, which can effectively reduce the residual stress in the structure during the impact process. The stop mechanism is utilized to enhance the viability of the gyroscope during the impact process. Based on this structure, the dynamic equation of the gyroscope and the impact oscillation motion function of the sensitive axis are derived. And the sensitive axis impact mode is investigated that the higher natural frequency and the smaller quality factor can improve the anti-shock performance of the gyroscope on the sensitive axis. Secondly, the modal analysis and impact characteristic simulation of the gyro structure are implemented by using the finite element analysis software. Results show that the maximum displacement and stress of the gyroscope structure are 9. 46 μm and 99. 6 MPa, respectively, when the shock amplitude is 15 000 g with 10 ms wide pulse. These results ensure that the gyroscope structure has a good anti-impact margin. Thirdly, the mature glass silicon bonding and deep silicon etching process are used to realize the processing of the gyroscope structure. And the vacuum packaging of the gyroscope structure is realized by combining ceramic packaging. The test system of the gyroscope is established by the driving closed loop and detection open loop. Finally, in the laboratory environment, the impact test of the gyroscope prototype is realized by using the impact platform. During the impact process (pulse width 0. 6 ms), there are several peaks of more than 5 000 g. The maximum peak value is 16 050 g, the response time of the gyroscope is about 1 s, and the change of the gyroscope zero position before and after the impact is less than 1%. The anti-overload ability of the prototype developed in this article is verified.

03

波浪驱动式海洋高频次精细化观测剖面仪的设计

Design of wave-powered profiler for high-frequency and fine ocean observation

【摘要】 波浪驱动式海洋剖面观测平台具有自主升降、快速剖面、高时空分辨、长期连续的综合优势，对当前海洋中小尺度动力过程、浮游植物生理昼夜变化、生物地球化学循环等快变过程研究具有重要意义。自主设计并研制了一种完全由波浪驱动的海洋剖面仪样机系统，于2021年8月8日～8月31日在青岛胶州湾海域以锚泊方式连续开展了23天海试，获取总剖面数2367个，平均每天102个，剖面平均周期8.19 min。结果进一步表明，在1级左右的低海况下，系统工作受潮流影响较大；而在2级以上的较高海况下，基本可以实现全天时连续工作，证明了自研波浪驱动式剖面仪样机具有良好的工作灵敏性、状态稳定性和机械耐受性，且设计成本只有国外同类产品价格的20%左右，为实现新型剖面观测平台的国产化目标迈出了关键一步。

【Abstract】 The wave-powered profiler for ocean observation has the comprehensive advantages of independent lifting, fast profile, high temporal-spatial resolution, and long-term continuity. It is of great significance to the study of the fast-changing processes of a small-submesoscale dynamic process, phytoplankton physiological diurnal change, and biogeochemical cycle in the ocean. In this article, a wave-powered profiler prototype is independently designed and developed. The test is implemented in Jiaozhou Bay, Qingdao for 23 days from August 8 to August 31, 2021. A total number of 2,367 profiles are obtained, which are probably 102 profiles per day with an average profile cycle of 8.19 minutes. The results further show that the system is greatly affected by the tidal currents under the calm sea state at about level 1. However, in the high sea state above level 2, the prototype could nearly work continuously throughout the day. The sea test has preliminarily proved that the prototype of the developed wave-powered profiler has a good working sensitivity, state stability, and mechanical endurance. The cost is only about 20% of the price of similar foreign products. The success of the prototype is a key step to achieving the goal of localization of the new profile platform.

04

基于滑动聚类的多传感器异步信息融合方法

A sliding-clustering-based method for multi-sensor asynchronous information fusion

【摘要】 传感器是智能检测和自动化装置中重要的部件组成，为了解决多传感器异步数据下的融合难题，提出了一种创新的基于滑动聚类的多传感器异步信息融合方法。首先引入了K-means聚类方法去容忍异步问题，主要利用曲线拟合给出一种简易的快速的判定法则以便实现实时聚类方法中的k值计算；其次设计了聚类滤波核从而在时空域上形成融合滑动管道，让数据的变化一直维持在一个能接受的误差之内，完整实现了实时多传感器信息融合方法。最后实验验证了设计的聚类融合方法的正确性以及合理性，实验证明了SC-MSIF方法是正确可行的，且在实时性方面具有较好的表现，相比较EKF和MEAN方法，SC-MSIF方法的RMSE误差减少了47.8%、36.3%,同时无人机中多传感器融合实际测试结果也较为优异。

【Abstract】 Sensors are important components in intelligent detection and automation devices. To solve the problem of fusion under multi-sensor asynchronous data, an innovative sliding clustering-based multi-sensor asynchronous information fusion method is proposed. Firstly, a K-Means clustering method is introduced to tolerate the asynchronous problem, which mainly uses curve fitting to give a simple and fast rule of thumb for the calculation of k-values in the real-time clustering method. Secondly, a clustering filtering kernel is designed to form a sliding pipeline for fusion in the spatial-temporal domain. In this way, the variation of data is always kept within an acceptable error, and the real-time multi-sensor information fusion method is fully implemented. Finally, the experiments validate the correctness and rationality of the designed clustering fusion method. The experiments show that the SC-MSIF method is correct and feasible and has a better performance in terms of real-time performance, and the RMSE error of the SC-MSIF method is reduced by 47.8% and 36.3% compared with the EKF and MEAN methods. The actual test results of multi-sensor fusion in UAVs are also better.

05

时栅位移传感器误差动态采样与补偿模型研究

Study on error dynamic sampling and compensation model of the time grating displacement sensor

【摘要】 针对现有时栅位移传感器误差补偿模型补偿效果受标定实验台速度影响的问题，提出了一种基于三次样条插值-傅里叶谐波合成的误差补偿模型。首先，根据时栅位移传感器多测头信号感应原理与整周误差曲线等间距周期性分布特性，分析短周期误差受标定实验台速度影响，引入传感器等间距采样的“错位”误差，该误差将直接影响构建的短周期误差补偿模型的补偿效果；其次，利用三次样条插值法准确定位误差采样位置，精确重构短周期误差曲线；最后，通过重构的短周期误差曲线与傅里叶谐波补偿法建立了短周期误差补偿模型，提高了时栅位移传感器误差补偿效果。实验结果表明，采用本补偿模型后传感器短周期误差峰峰值降至1.7″;本补偿模型短周期误差补偿效果优于传统基于傅里叶谐波补偿法构建的补偿模型，标定实验台速度为3 r/min时补偿效果可提高56.0%,既能满足传感器动态标定的工作效率，也能满足传感器的高精度误差标定需求。

【Abstract】 The compensation effect of the current dynamic compensation model of the time grating displacement sensor is affected by the speed of calibration platform. To address this issue, an error compensation model based on cubic spline interpolation-Fourier harmonic compensation method is proposed. Firstly, the periodic distribution characteristics of multiple probe and whole cycle error curves of time grating displacement sensor are utilized. The short period error is affected by the speed of calibration platform, and the “dislocation” error is introduced. The dislocation error directly affects the compensation effect of the short period error compensation model. Secondly, the cubic spline interpolation method is used to locate the error sampling position accurately and reconstruct the short period error curve accurately. Finally, according to the reconstruction of short period error curve and the method of Fourier harmonic compensation short period error compensation model is established, the error compensation effect of time grating displacement sensor is improved. Experimental results show that the peak-to-peak value of short period error decreases to 1.7″ after using the compensation model. The compensation effect of short period error is better than the traditional compensation model based on Fourier harmonic compensation method. When the calibration platform rate is 3 r/min, the compensation effect can be increased by 56.0%. It cannot only meet the working efficiency of sensor dynamic calibration, but also meet the demand of sensor high-precision error calibration.

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